The Saffrons will face All-Ireland champions Tyrone in the Ulster final on 19 July.
Tyrone will be overwhelming favourites but their manager Mickey Harte, one of the 16,377 spectators at St Tiernach's Park, will have been impressed by Antrim.
They bossed the first half and landed early points from play through Sean Burke, Tomas McCann and Terry O'Neill.
Losing Cavan manager Tommy Carr says that Antrim were the fresher and hungrier team on the night.
Cavan's first four points came from Seanie Johnston but Antrim kept their noses in front through Michael McCann (2), James Loughery and Paddy Cunningham.
Martin Reilly and Ray Cullivan replied for Cavan who were probably satisfied to be just one point down at the break after being outplayed.
But Tommy Carr's men were immediately under the cosh again after the break.
Points from play by Burke, Aodhan Gallagher and Justin Crozier, plus two Cunningham frees, had Antrim in complete control at 0-12 to 0-6.
But suddenly the situation changed as substitute David Gibney turned to shoot in the goal which revived Cavan's hopes.
A point by Larry Reilly then left just two in it and questions were starting to be asked about Antrim's ability to kill off their opponents.
However, Antrim were not to be denied as Kevin Niblock calmed the nerves with a score from play and Cunningham added another free.
Cavan attacked frantically and almost created a goal chance but Antrim got home by three points.
Antrim: P Graham, C Brady, A McClean, K O'Boyle, T Scullion, J Crozier (0-1), J Loughrey (0-1), N McKeever, A Gallagher (0-1), T O'Neill (0-1), K Brady, P Cunningham (0-4, 3f), S Burke (0-2), M McCann (0-2, 1f), T McCann (0-1). Substitutes: K Niblock for McKeever (59), C Close for K Brady (64).
Cavan: J Reilly, M Hannon, D Sheridan, M Brides, J McCutcheon, E Keating, P O'Reilly, N Walsh, C Galligan, S Brady, R Flanagan, C Mackey, S Johnston (0-4, 2f), R. Cullivan (0-1), M Reilly (0-1). Substitutes: P Brady for P Reilly (20), R Dunne for McCutcheon (40), L Reilly (0-1) for S Brady (44), D Givney (1-0) for Mackey (53), J O'Reilly for Keating (62).
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